XUUS EUV
XUUSTM is a coherent EUV (Extreme UltraViolet) beamline and enables experiments and investigations in the EUV range that are otherwise only possible at synchrotron facilities.
Typical applications include imaging with high spatial and temporal resolution, investigation of magnetic materials, metrology of nanoelectronics and EUV lithography, and the study of molecular dynamics and fast processes in the attosecond range.
