EDS

Microanalysis using an electron microscope is a widely used method for elemental determination by recording an X-ray fluorescence spectrum. The variety of Oxford Instruments EDS detectors allows us to tailor a package for your application and budget that can be attached to a Zeiss or other electron microscope. Applications range from simple point spectra acquisition to automated particle analysis. For some time now, Oxford Instruments EDS software has also enabled work within GxP guidelines.

Ultim Max EDS detectors utilise high-end technology to achieve unparalleled speed and sensitivity without compromising on accuracy or quality. This range of detectors combines the largest sensor sizes (up to 170 mm2) with extreme electronics to achieve remarkable performance.

Only Ultim Max offers guaranteed performance at low (CKa and FKa) and high energy (MnKa) at the same highly productive count rate of 130,000 cps for all sensor sizes. Performance is tested on an SEM prior to shipment and again upon installation to ensure that each Ultim Max delivers outstanding results even under the most demanding analytical conditions (high count rates, low kV, insitu testing).

All Ultim Max detectors can be deployed quickly and easily when required and retracted when not in use thanks to an integrated motorised slide.

• Sensor sizes from 40 mm2 to 170 mm2 all offer the same analytical performance.
• Guaranteed resolution at CKa of 46eV or better at all count rates up to 50,000 cps.
• Guaranteed resolution at MnKa of 127 eV or better at all count rates up to 200,000 cps.
• Unique new Tru-Q® IQ spectra processing. Each detector is characterised in the SEM during manufacture and individually optimised to ensure accurate data processing every time.
• Infinity pulse processing and pile-up correction enable the identification of elements and the display of a true artefact-free element distribution.

Other EDX detectors:

Xplore

A detector for general EDS (entry-level model)

The Xplore EDS detector is designed for routine SEM analysis. It incorporates the same proven technology as the class-leading Ultim Max large area detectors, so users can expect the same high-quality results, but in a much smaller package. 

The Xplore detectors are available with sensor sizes of up to 65 mm2 and all offer a guaranteed Mn Kα resolution of 129 eV on your SEM. Furthermore, this resolution is guaranteed under real working conditions (up to 100 Kcps). This makes the Xplore the ideal detector for anyone looking for the reliability and accuracy of a high-end detector in an affordable package.

Unity BEX

BEX combines backscattered electron and X-ray (BEX) imaging in a single technique, simultaneously. This is a breakthrough in the industry as it integrates the best of both techniques to reduce your time to detection.

BEX combines the topographic, crystallographic, atomic and elemental information into an instant visual output as you navigate through your sample. So you no longer have to rely on luck or judgement to find areas of interest in your sample. Instead, BEX allows you to instantly review the results and either focus on the points of interest or move on.